High purity gas supply system
- Manufacturer Wiz technology
- Manufacture date 2018
- Model Customized model
- Location IBS HQ C 147 utility room
- Manager None
PURPOSE
- To supply high purity gas.
- Device fabrication, chemical process, crystal growing, and general usages
SPECIFICATION AND PERFORMANCE
- Supply of ultra-high purity gas (99. 9999 %)
- High and low pressure regulator
- Auto changing system
- Pressure monitoring system
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